STMicroelectronics, in partnership with Singapore’s A*STAR Institute of Microelectronics (IME), the A*STAR Institute of Materials Research and Engineering (IMRE) and Japanese semiconductor equipment vendor ULVAC, has launched Lab-in-Fab 2.0—the next phase of its R&D program focused on piezoelectric MEMS. The initiative is based at STMicroelectronics’ Ang Mo Kio campus in Singapore.

The next phase of the program aims to replace lead-based piezoelectric materials (PZT) with support from IMRE, while also helping fabless MEMS start-ups move more quickly from prototyping to commercial manufacturing.

A piezoMEMS lab inside a fab

In an exclusive interview with EE Times, Anton Hofmeister, group VP and general manager of Central R&D for the Analog, Power, and Discrete MEMS and Sensors group at STMicro, said the location of the MEMS R&D lab program is key to its success and efficiency.

“The name Lab-in-Fab reflects the fact that the lab is integrated into STMicroelectronics’ existing semiconductor campus in Singapore,” Hofmeister said. “At the end of your development process, there is no need to transfer from a research line to a fab in another part of the world, which is always complicated—especially in MEMS. This way, time to market is much faster.”

Speaking about the partnership model with A*STAR, he added, “Research institutes can pursue long-term objectives, while we, as a company, can focus on near-term product development. ULVAC enables us to adapt MEMS tools for our new manufacturing processes, offering an edge over off-the-shelf equipment.”

What came out of phase one

The first phase of Lab-in-Fab was launched in 2020, coinciding with the onset of the pandemic.

“It took nearly two years to acquire and install tools, qualify the line, and complete the hiring of the team,” Hofmeister said. “In 2023, we started processing first wafers, and in 2024, we started engaging with first customers.”

In a press statement, A*STAR IME said that phase one resulted in a fully operational 200-mm piezoMEMS line. The standout development was a new physical vapor deposition-based PZT (lead zirconate titanate) transducer platform. This process was easier to scale than traditional sol-gel methods and reduced lead content by 99%, making it a more environmentally friendly option.

During this phase, the team identified the need to explore alternative materials to eventually replace PZT. This led to the inclusion of IMRE in phase two to accelerate the development of a lead-free PZT.

“As the industry moves toward environmentally responsible materials, our goal is to develop an alternative material, and we are currently working on various options to qualify a material that can match PZT performance and reach manufacturing readiness by the second half of 2027,” Hofmeister said.

Target applications and Multi-Wafer Project access

The Lab-in-Fab partnership also introduced a Multi-Wafer Project service, giving local and global research institutions access to differentiated piezoMEMS platforms for innovation. IME confirmed that the service will continue in phase two and is already being used for training, prototyping and academic research.

The piezoMEMS research targets use cases in consumer electronics, medical diagnostics and robotics, according to IME. Hofmeister elaborated on a few of the applications currently in development.

“STMicroelectronics has partnered with a company developing a piezoMEMS actuator for the autofocus function in smartphone camera modules, offering faster focusing speeds than conventional systems. Also, with piezoMEMS technology, companies can replace conventional microspeakers in a highly miniaturized format to integrate them into headsets and other space-constrained devices.”

“PiezoMEMS adoption is growing in many application areas where miniaturization is critical,” he added. “PMUTs are another application, where piezoMEMS is used for portable, miniaturized medical ultrasound devices. They offer lower power consumption and compact form factors, making them ideal for mobile diagnostic tools.”

Investment, talent and infrastructure

STMicro has not disclosed specific investment figures for Lab-in-Fab, but Hofmeister indicated that the current tool set and capability for piezoMEMS is world-leading and unique. Investment and operational expenses are shared between STMicro and IME. IME also contributed by relocating its earlier MEMS R&D toolset to the Ang Mo Kio campus.

In parallel, STMicro is working to develop MEMS-specific engineering talent in Singapore. The company is collaborating with several local universities and is considering a Master’s program to train future MEMS designers with expertise in both electronics and micromechanics.

“MEMS is a small field that requires a dual-discipline skill set, and we are trying to create more structured academic programs to support that,” Hofmeister said.

Global model, local presence

While the Lab-in-Fab is based in Singapore, its model is open to global collaboration. This includes partnerships with start-ups and research institutions from Europe, North America and Asia.

“Today, about two-thirds of the start-ups we work with come from the U.S. and Europe, but we want to grow our collaboration with companies in Asia,” Hofmeister said. “We are also in early talks with Indian research institutes. Nothing to announce yet, but we are open to partnerships.”

Hofmeister added that Lab-in-Fab 2.0 not only supports STMicro’s global MEMS roadmap but also builds on its long-standing base in Southeast Asia. The MEMS R&D line sits inside STMicro’s high-volume production site in Singapore, making it easier to scale technologies and support regional partners.

“The local MEMS R&D team in Singapore is an extension of our MEMS R&D team located in Agrate, Italy, and ensures worldwide coverage,” he said.

The initiative aligns with Singapore’s Research, Innovation and Enterprise 2025 plan, which prioritizes piezoMEMS, advanced materials and integrated manufacturing systems.

“Our long-term business objective is to remain a leader in piezoMEMS through our own products but also act as a wafer manufacturing partner for fabless MEMS companies. That is the dual value we see in this initiative,” Hofmeister concluded.

From EETimes